In this paper, we suggested the new fault pursuit method focused on the Pneumatics that is importantly regarded as the part of life cost for the improvement of maintenance cost and maintainability make it possible to find the faults rapidly. Also, we developed the fault pursuit model for the hardware part of Pneumatics to improve the maintenance of Pneumatics system. By applying this model, we proposed the t ask analysis model that is presented by sequence expression, graphic expression, circuit expression, system circuit, recommendation circuit using VDI 3226 which are the major six functions of Pneumatics system. Consequently, we developed and applied the fault pursuit process to implement the (1) comprehension method by sequence method, and (2) method by Pneumatics parts analysis.