There are many alarm equipments embedded in the in-line track to support photo process of display manufacturing. The alarm information is recoded by the alarm systems. The abnormal operation of alarm system decreases the operating ratio of track equipments and finally the productivity of manufacturing is also decreased. First of all, the alarm data was categorized into both down alarm and non-down one. Equipment failure analysis was performed using real alarm data and the result was compared with normal operating alarm systems. Finally effective measures were reduced to improve the manufacturing productivity and the operating ratio of track equipments.