Despite the low loss level and high productivity, the accurate manufacturing conditions are required for the automated imprints. This paper deals with the average height of surface for the chemical treatment of imprints. The samples of sections of imprints are collected and measure the intensity of illumination. The samples are deposited in the chemically treated devices under the experimentally designed conditions. The difference of illumination between before and after the chemical treatment is measured. The statistical analysis shows the causal relationship between the chemical treatment and the roughness processed. This paper deals with major defects and improvements as well as the classification and condition of imprint manufacturing. Since the imprint manufacturing could attain low loss level and high productivity, the demand of accurate manufacturing would be increased according to the trend of factory automation. Considering these the practical merits, the growth and improvement of imprint manufacturing is expected.