In this research, we introduce an international standard related to performance tracking of semiconductor manufacturing equipment, which is called as SEMI E116-0707E, and then suggest standard specifications which can help to track and analyze the performance of equipment or equipment modules effectively. The suggested specifications are named as TaskExpectedTime and TaskTimeout concerning to processing time in equipment and equipment module, and RecipeID and WaferID concerning to process recipes and wafers. Through these specifications, it can be possible to identify equipment or process steps which affect the performance of overall manufacturing system as well as analyze the equipment performance tracking more precisely.