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KCI 등재
다구찌 동특성을 활용한 LCD 전극형성 공정조건 최적화
Optimization of LCD Pattern Forming Process Parameters Using Taguchi Dynamic Characteristics
지수윤 ( Soo Yoon Ji ) , 장중순 ( Joong Soon Jang )
UCI I410-ECN-0102-2015-500-000121313

LCD requires uniform electrode patterns to realize a good image display. If the pattern width does not coincide with the target, critical defects such as ``open`` or ``short`` may occur. Taguchi dynamic characteristic approach is used to improve the processes of photo exposure, development and etching, to get uniform pattern width in advance technologically. Transformability is also used for ideal process function because the photo mask pattern width is varying from the target which is used as an input to the process. This research shows that the improvement of ideal function of relevant process is possible using Taguchi dynamic characteristic SN ratio, which is effective on securing precedence, universality and reproducibility of technology to optimize the process and facility condition.

1.서 론
2.전사성 이상기능 다구찌 동특성
3.시례 연구
4.결론 및 향후 곙획
참고문헌
[자료제공 : 네이버학술정보]
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