The fabrication (Fab) layout design is a strategic issue and has a significant impact on the efficiency of a semiconductor manufacturing system. Fab layout consists of manufacturing equipments and material handling system, while material handling system is getting more and more important. In case of Fab layout design, manufacturing and material handling factors should be taken into consideration simultaneously. Although there are some previous works on fab design and evaluation methods, they only focus their own specific performance indices. Therefore, in this paper, we suggest an Analytic Hierarchy Process (AHP)-based evaluation method considering various criteria together to evaluate Fab facility layout. Specifically, we categorize all the design factors into four groups and evaluate characteristic values of them by using experts review from an electronic company in Korea. We exemplify the proposed method by using three Fab layout in the literature.