In this study metal oxide nanopillar arrays were formed by anodic oxidation of aluminum process. The metal oxide nanopillars have been used the formation array of nanodot or metal nanotip. These nanodot arrays are useful for application to flash memory, optoelectronic and quantum effect device. We have reported on a simple and inexpensive method for fabricating metal oxide nanopillar using alumina nanopore that are suitable for nanostructure investigation. Height, diameter and density of metal oxide nanopillars can be controlled by electrolyte.