Purpose The purpose of this paper is to implement an automated system that automatically handles MCRS problems in semiconductor lines.
Methods Standardized and structured the way manual handling of MCRS problems caused by equipment problems. Therefore, MES-based automatic TMAP system, which is an automatic processing method that can be systematically processed, was implemented and applied.
Results As a result, in the process of processing MCRS by applying TMAP, the intervention of workers and engineers was minimized, and the working time was reduced by about 23.1%.
Conclusion However, the task of confirming the defect image of TMAP judgment is still being performed manually, and further research is needed using new IT technology.